- All sections
- C - Chemistry; metallurgy
- C23C - Coating metallic material; coating material with metallic material; surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 16/452 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by activating reactive gas streams before introduction into the reaction chamber, e.g. by ionization or by addition of reactive species
Patent holdings for IPC class C23C 16/452
Total number of patents in this class: 333
10-year publication summary
38
|
26
|
32
|
34
|
31
|
23
|
23
|
25
|
13
|
4
|
2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
Owner |
All patents
|
This class
|
---|---|---|
Applied Materials, Inc. | 16587 |
56 |
Tokyo Electron Limited | 11599 |
30 |
Lam Research Corporation | 4775 |
16 |
Kokusai Electric Corporation | 1791 |
15 |
Novellus Systems, Inc. | 559 |
13 |
ASM IP Holding B.V. | 1715 |
13 |
Toshiba Mitsubishi-Electric Industrial Systems Corporation | 1583 |
10 |
Quantum Elements Development, Inc. | 18 |
9 |
Taiwan Semiconductor Manufacturing Company, Ltd. | 36809 |
8 |
Samsung Display Co., Ltd. | 30585 |
6 |
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | 6132 |
6 |
International Business Machines Corporation | 60644 |
5 |
Varian Semiconductor Equipment Associates, Inc. | 1282 |
5 |
Gallium Enterprises Pty Ltd. | 16 |
5 |
Beijing E-town Semiconductor Technology, Co., Ltd | 246 |
5 |
Massachusetts Institute of Technology | 9795 |
4 |
Georgia Tech Research Corporation | 2453 |
3 |
Korea Advanced Institute of Science and Technology | 3906 |
3 |
MKS Instruments, Inc. | 698 |
3 |
National University Corporation Nagaoka University of Technology | 129 |
3 |
Other owners | 115 |